For more information

Please contact:
Dmitri Litvinov, Director
Nanofabrication Facility  
N308 Engineering Building 1
University of Houston
Houston, TX 77204 USA
Phone: 713-743-4168
Fax: 713-743-0544
Email: litvinov [at] uh [dot] edu

News

Denton Desk II Sputtering System
May 07, 2013

We now have a Denton Desk II sputtering system available for use.

Band Saw
April 25, 2013

We don't always do nanofab, sometimes we need to do macrofab too and we are very grateful to Metal Sawing Technology http://www.metalsaw.com/ for donating this band saw to the UH Nanofab.

Plot of number of active users vs. time
March 01, 2013

Our user base continues to grow. The UH Nanofabrication Facility is available to researchers both on and off campus; we're here to help the nanotechnology community in Houston and beyond. We've also started offering contract services so if you cannot come in person our staff can still help you.

ABM Mask Aligner
February 06, 2013

The new ABM mask aligner features a user-friendly interface and a rugged design to provide us with maximum up-time. It provides us with the capability of working on larger wafers as well as small pieces and this system features backside alignment. We would like to express our appreciation to Prof. Gila Stein, Chemical & Biomolecular Engineering, for making this tool available to the Houston research community via the UH Nanofabrication Facility.

January 08, 2013

Construction has begun on the the new Houston Football Stadium. It's scheduled to be finished in August of 2014; you can learn some facts about the new stadium here. Parking near the UH Nanofab facility will be impacted by the construction.

December 07, 2012

We've added new computers running Linux to the cleanroom. These computers have internet access and are for the convenience of our facility users. If you haven't used Linux before it shouldn't be a problem because these systems have a user interface very similar to Windows and Macintosh. You do not need to log in, they all use a single shared user account and come pre-loaded with a variety of useful software. We're using Ubuntu Linux 12.04LTS.

November 05, 2012

Our Leitz Microscope has a new 10 mega pixel camera and updated software. A new SOP has been added to our website http://nanofab.uh.edu/equipment/analysis/optical-microscopes (you have to be logged in to access it.)

October 19, 2012

The new JEOL JBX-5500 e-beam lithography system will be available for all UH Nanofab users starting November 1st 2012. Please contact Nanofab staff to arrange training.


The JBX-5500FS electron beam lithography system is designed for writing patterns with nanometer precision. The system produces a 50 kV electron beam from a ZrO/W emitter and a four-stage electron beam focusing lens system. A 4 nm wide gaussian beam is vector scanned at a rate of 12 MHz with scan increments of 0.5 nm to produce high fidelity patterns from a CAD layout. A high-speed stage equipped with a laser position system enables patterns to be written across an entire 100 mm wafer. The intuitive interface provide ease of use enabling a new user to produce sub 50 nm patterns independently in as little as 4 hours of training.
October 12, 2012

The sample exchange rod for the UHV Sputtering System has a small machined part with three 'fingers' mounted on the end; an accidental drop caused one of these fingers to break off. Because of the three-dimensional nature of the part it would be an involved process to make in the machine shop, instead a relatively simple 3D model was created using Alibre (www.alibre.com) and the part was ordered from Shapeways (www.shapeways.com) where it was made using a 3D printing process. The part is made from bronze-infused stainless steel powder; it has slightly different dimensions form the original due to limitations on the printing process but it is a completely functional replacement that required very little design time and minimal cost.

September 20, 2012

Join us Friday Oct 12, 2012 from noon to 1:30pm on the UH campus at Engineering Building 2 (Building D3) Room W122 for free pizza and learn what you can do at the UH Nanofabrication Facility.