For more information

Please contact:
Dmitri Litvinov, Director
Nanofabrication Facility  
N308 Engineering Building 1
University of Houston
Houston, TX 77204 USA
Phone: 713-743-4168
Fax: 713-743-0544
Email: litvinov [at] uh [dot] edu

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Cleanroom Specifications

The Nanofabrication Facility includes a 3300 square foot cleanroom with 1800 square feet of Class 100 space and 600 square feet of Class 10 space.

Cleanrooms are classified by the level of airborne particles present. The classification was established in Federal Standard 209E. This standard was officially canceled in 2001 but is still commonly used to describe cleanrooms:

Class Particles per Cubic Foot
Particle Size: ≥0.1μm ≥0.2μm ≥0.3μm ≥0.5μm
10 350 75 3 1
100 NA 750 30 10
1000 NA NA 300 100

ISO standard 14544-1 replaced the old standard but the classes are functionally equivalent

209E Standard Functional Equivalent for ISO 14544-1
Class 10 ISO Class 4
Class 100 ISO Class 5
Class 1000 ISO Class 6

ISO 14544-1 classes, note that particle count limits are in cubic meters

Class Particles per Cubic Meter
Particle Size: ≥0.1 μm ≥0.2 μm ≥0.3 μm ≥0.5 μm ≥1.0 μm ≥5.0 μm
4 10,000 2,370 1,020 83 8 NA
5 100,000 23,700 10,200 832 83 NA
6 1,000,000 237,000 102,000 8,320 832 29

Under the ISO standard a cleanroom is designated by :

  • Class number
  • Particle sizes being monitored
  • The occupancy state of the cleanroom

We monitor during cleanroom operating hours and we monitor particle sizes 0.3μm, 0.5 μm and 5.0 μm.