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Administrative Contact:
Mary Nguyen
Nanofabrication Facility
3605 Cullen Blvd, Rm 1009
Houston, TX 77204-5062
Phone: 713-743-4104
Email: dknguyen [at] uh [dot] edu

Technical Contact:
Long Chang
Nanofabrication Facility
3605 Cullen Blvd, Rm 1007A
Houston, TX 77204-5062
Phone: 713-743-5235
Email: lvchang [at] central [dot] uh [dot] edu

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Cleanroom Air Handling

Cleanroom Air Handling
  • Air handling is a key element to cleanroom operation; there are various methods to implement air handling, our system uses a unidirectional vertical air flow.
  • Fresh outside air is brought in through 8 High Efficiency Particulate Air (HEPA) filters and dehumidified before it reaches the cleanroom plenum.
  • The air inside the cleanroom is constantly recirculated and supplemented with outside air.
  • 14 air handler units move air from the plenum into the cleanroom.      
  • There are a total of 84 HEPA filters that pre-filter air going into the 14 air handlers.
  • The entire ceiling of the cleanroom is covered with 296 Ultra Low Particulate Air (ULPA) filter panels; the air handlers push the air through these filters.
  • The air moves unidirectional downward toward the floor and exits through vents along the bottoms of the walls.