For more information

Administrative Contact:
Mary Nguyen
Nanofabrication Facility
3605 Cullen Blvd, Rm 1009
Houston, TX 77204-5062
Phone: 713-743-4101
Email: dknguyen [at] uh [dot] edu

Technical Contact:
Long Chang
Nanofabrication Facility
3605 Cullen Blvd, Rm 1007A
Houston, TX 77204-5062
Phone: 713-743-5235
Email: lvchang [at] central [dot] uh [dot] edu

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AccuThermo AW 410 RTP/RTA
AccuThermo AW410 RTP/RTA
Rapid Thermal Processing System
An oven designed for silicon wafers capable of rapidly heating them using visible light radiation; it can increase the temperature of the wafer as fast as 100 °C per second. It is designed for growth of thermal oxide layers.
Blue M Electric Ovens
Blue M
206 Size Oven
Industrial oven. Quantity: 2
Wet Benches
Exhausted Wet Benches
Wet Bench
Benches with fume hoods, sinks, hand sprayer and nitrogen blower.
Nanofab inventory computer
Nanofab Inventory
The Nanofab Inventory is a customized Microsoft Access database. Facility users can enter an item into the database and the thermal printer will create a label that uniquely identifies the item and establishes who owns the item. The database serves as a chemical inventory but can be used for non-chemical items as well.