Equipment—Processing

For more information

Please contact:
Dmitri Litvinov, Director
Nanofabrication Facility
N308 Engineering Building 1
University of Houston
Houston, TX 77204 USA
Phone: 713-743-4168
Fax: 713-743-0544
Email: litvinov [at] uh [dot] edu

University of Houston Nanofabrication Facility

RTP

Name: AccuThermo AW 410 RTP/RTA

Mfr.: Allwin21

Model: AccuThermo AW410 RTP/RTA

Type: Rapid Thermal Processing System

An oven designed for silicon wafers capable of rapidly heating them using visible light radiation; it can increase the temperature of the wafer as fast as 100 °C per second. It is designed for growth of thermal oxide layers.

Ovens

Name: Blue M Electric Ovens

Mfr.: Blue M

Model: 206 Size Oven

Type: Oven

Industrial oven. Quantity: 2

Wet Benches

Name: Exhausted Wet Benches

Type: Wet Bench

Benches with fume hoods, sinks, hand sprayer and nitrogen blower.