For more information

Administrative Contact:
Mary Nguyen
Nanofabrication Facility
3605 Cullen Blvd, Rm 1009
Houston, TX 77204-5062
Phone: 713-743-4101
Email: dknguyen [at] uh [dot] edu

Technical Contact:
Long Chang
Nanofabrication Facility
3605 Cullen Blvd, Rm 1007A
Houston, TX 77204-5062
Phone: 713-743-5235
Email: lvchang [at] central [dot] uh [dot] edu

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Equipment—Direct Machining

Focused Ion Beam (FIB)
FEI 235 Dual-Beam Focused Ion-beam System equipped with TEM sample extraction probe
FEI
FEI-235
Dual-Beam Focused Ion Beam
The FEI 235 contains both an electron beam and a gallium ion beam; both can be used like a scanning electron microscope but the ion beam can also be used for nanoscale milling and patterning with line widths as small as 20nm. This system is also equipped with a gas injection system for metal deposition, a micromanipulator for sample interaction and an EDX detector for compositional analysis.