Equipment—Direct Machining

For more information

Please contact:
Dmitri Litvinov, Director
Nanofabrication Facility
N308 Engineering Building 1
University of Houston
Houston, TX 77204 USA
Phone: 713-743-4168
Fax: 713-743-0544
Email: litvinov [at] uh [dot] edu

University of Houston Nanofabrication Facility

Focused Ion Beam (FIB)

Name: FEI 235 Dual-Beam Focused Ion-beam System equipped with TEM sample extraction probe

Mfr.: FEI

Model: FEI-235

Type: Dual-Beam Focused Ion Beam

The FEI 235 contains both an electron beam and a gallium ion beam; both can be used like a scanning electron microscope but the ion beam can also be used for nanoscale milling and patterning with line widths as small as 20nm. This system is also equipped with a gas injection system for metal deposition, a micromanipulator for sample interaction and an EDX detector for compositional analysis.