Equipment—Analysis

For more information

Please contact:
Dmitri Litvinov, Director
Nanofabrication Facility
N308 Engineering Building 1
University of Houston
Houston, TX 77204 USA
Phone: 713-743-4168
Fax: 713-743-0544
Email: litvinov [at] uh [dot] edu

University of Houston Nanofabrication Facility

Atomic Force Microscope

Name: Veeco Dimensions 3000 Atomic Force Microscope

Mfr.: Veeco

Model: Dimensions 3000

Type: Atomic Force Microscope

The Veeco 3000 uses a sharp probe to trace contours on a surface but instead of taking one profile it raster back and forth over the sample surface creating a topographic map of height vs. x and y position.

Profilometer

Name: Alpha-Step 200 Profilometer

Mfr.: Tencor

Model: Alpha-Step 200

Type: Profilometer

The Alpha-Step 200 creates is used to view profiles of a sample surface. A sharp probe moves in a line along the surface, moving up or down when features on the surface are encountered. It is used to measure trench depth or step heights on a surface.

Ellipsometer

Name: Gaertner Ellipsometer

Mfr.: Gaertner

Type: Ellipsometer

A linearly polarized HeNe laser is used to quickly measure film thickness and its index of refraction.

Optical Microscopes

Name: Leitz Microscope

Mfr.: Leitz/Leika

Model: 20448026

Type: Inspection Microscope

Reflected light optical microscope with magnification up to 200x.

Name: Olympus Inspection Microscope

Mfr: Olympus

Model: BHMJL

Type: Inspection Microscope

Optical microscope with magnification up to 800x.